Methodological materials on the discipline "Microscopy Methods" contain its regulatory framework, recommendations for organizing and conducting lectures, practical classes, seminars, laboratory works and business games, a list of educational video and audio materials, slides, typical posters and other didactic materials necessary for the work of the faculty in this discipline. For students, graduate students and teachers of higher technical educational institutions in the direction of training "Nanotechnology" with the profile of training "Nanoengineering." They will be useful to everyone involved in nanotechnology, nanoengineering, MEMS and NEMS design, and the creation of electronic systems for various purposes.