BOOKS - EQUIPMENT - Термические процессы в микроэлектронике...
US $9.68
521479
521479
Термические процессы в микроэлектронике
Year: 1987
Number of pages: 199
Format: DJVU | PDF
File size: 10 MB
Number of pages: 199
Format: DJVU | PDF
File size: 10 MB
The book describes the processes of manufacturing semiconductor devices and microcircuits by diffusion, planar and elionic technology, as well as the application of epitaxial, dielectric and metal films. Process equipment was considered. The third edition (2nd - in 1980 "Vacuum-thermal and thermal processes in semiconductor production") is supplemented with material on the main thermal processes, as well as information on their complex automation.
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