BOOKS - SCIENCE AND STUDY - Электрохимические процессы в технологии микро- и наноэлек...
US $6.55
666616
666616
Электрохимические процессы в технологии микро- и наноэлектроники
Author: Гаврилов С.А., Белов А.Н.
Year: 2009
Number of pages: 258
Format: PDF
File size: 11 MB
Language: RU
Year: 2009
Number of pages: 258
Format: PDF
File size: 11 MB
Language: RU
The basics of electrochemical processes used in the technology of micro- and nanostructures, which have been intensively developing recently, are presented. The tutorial contains brief information on the laws and regulations of the theory of electrode equilibrium and electrochemical! kinetics, description of mechanisms for the formation of solid micro- and nanostructures, information on the features of the production and use of porous silicon, description of electrochemical processes in MEMS technology, processes for the formation of barrier and porous anode oxides and their application in micro- and nanotechnology, anode oxidation processes using a scanning probe microscope, cathode deposition of metals and semiconductors, their application in UBIS technology, MEMS and nanotechnology.
You may also be interested in:
