BOOKS - TECHNICAL SCIENCES - Современное технологическое о...
US $7.83
290711
290711
Современное технологическое оборудование для микроэлектроники
Author: Камлюк В.С., Камлюк Д.В.
Year: 2022
Format: PDF
File size: 29 MB
Language: RU
Year: 2022
Format: PDF
File size: 29 MB
Language: RU
The manual presents modern types of semiconductor production equipment. Main characteristics of process equipment and requirements to it are given. The issues of adjustment, adjustment and certification of equipment are considered. The series of equipment described corresponds to an exemplary route for manufacturing microelectronics products.