The book is devoted to the description of the basic physical principles, structures and methods of modeling, as well as trends in the development of modern and promising silicon nanoelectronics with technological standards less than 100 nm. For teachers and students specializing in micro- and nanoelectronics, electronics, electronic measuring systems. It can be used in the educational process in the preparation of training courses "Physical foundations of nanoelectronics," "Nanoelectronic technologies," "Physics of microelectronic structures."