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Технология тонких и толстых пленок для микроэлектроники - Джоветт Ч.Е. 1980 PDF/DJVU Москва Металлургия BOOKS PROFESSIONS AND CRAFTS
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Технология тонких и толстых пленок для микроэлектроники
Author: Джоветт Ч.Е.
Year: 1980
Format: PDF/DJVU
File size: 11 MB
Language: RU

The book describes the principles of creating microelectronic devices based on various processes for applying thin and thick films. Based on the modern practice of their manufacture, a comparative analysis of the features of the technology for the production of thin and thick films, thin-film microwave devices was carried out, the possibilities that the use of hybrid elements of thick-film circuits opens up are considered; issues of metallurgical compatibility of materials from which these elements are made are discussed. In addition, the types of multilayer wiring and the technique for their production, the processes of forming thick-film resistive structures, as well as a number of other issues are described.

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