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Автоматизация технологического оборудования микроэлектроники - А. А. Сазонов 1991 PDF Москва "Высшая школа" BOOKS TECHNICAL SCIENCES
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Автоматизация технологического оборудования микроэлектроники
Author: А. А. Сазонов
Year: 1991
Number of pages: 336
Format: PDF
File size: 15,49 MB
Language: RU

The book discusses the development of control systems for the main technological processes of integrated circuits, including the issues of modeling and identification of technological equipment, the development of information and measuring systems, control and actuating devices, as well as control systems for some specific technological processes and technological microclimate.

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