BOOKS - TECHNICAL SCIENCES - Автоматизация технологического оборудования микроэлектро...
US $7.80
110368
110368
Автоматизация технологического оборудования микроэлектроники
Author: А. А. Сазонов
Year: 1991
Number of pages: 336
Format: PDF
File size: 15,49 MB
Language: RU
Year: 1991
Number of pages: 336
Format: PDF
File size: 15,49 MB
Language: RU
The book discusses the development of control systems for the main technological processes of integrated circuits, including the issues of modeling and identification of technological equipment, the development of information and measuring systems, control and actuating devices, as well as control systems for some specific technological processes and technological microclimate.
You may also be interested in:
