The task of reducing the linear dimensions of the used elements of microcircuits is one of the main ones in microelectronics. The creation of circuit elements with characteristic sizes of the order of units and tens of nanometers qualitatively changes the electronics and transfers it to a new area - nanoelectronics. The physics of the work of elements is also changing - they will work mainly on the principles of quantum mechanics. The creation of integral nanoelectronic quantum circuits by nanotechnology methods is essentially one of the ultimate goals.