General provisions of thermodynamics of irreversible processes are presented; patterns of diffusion and thermokinetics in stationary and moving media, macrokinetics of heterogeneous processes; mathematical description of two-phase equilibria; Р - T-x state diagrams, their projections and sections. Material balance, thermodynamics and kinetics of widely used processes of obtaining materials from vapor, vapor-gas and liquid phases are considered. At the atomic-molecular level, the kinetics of the processes for producing epitaxial layers, films and single crystals are described. For the first time, methods of non-thermal activation and plasma chemical processes, the causes of defects during ion exposure to materials are described. For university students studying in the direction of "Electronics and Microelectronics" and the specialty "Materials and components of solid-state electronics."