BOOKS - EQUIPMENT - Технологии субмикронных структур микроэлектроники...
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81022
81022
Технологии субмикронных структур микроэлектроники
Author: А.П. Достанко, С.В. Бордусов, Д.А. Голосов и др. ; под ред. А.П. Достанко
Year: 2018
Format: PDF OCR
File size: 18 MB
Language: RU
Year: 2018
Format: PDF OCR
File size: 18 MB
Language: RU
The results of research and development in the field of technology and equipment for the production and diagnosis of submicron structures of semiconductor microelectronics are reviewed and summarized.
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