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288280
288280
Технология микроэлектронных устройств
Author: Готра З.Ю.
Year: 1991
Number of pages: 530
Format: DJVU
File size: 10 MB
Language: RU
Year: 1991
Number of pages: 530
Format: DJVU
File size: 10 MB
Language: RU
Mechanical, chemical, ion, plasma, electron beam and other processing methods in microelectronic device technology are considered. Single crystal growth, diffusion, epitaxy, ion implantation, thin film technology, lithography, assembly and sealing data are summarized. Considerable attention is paid to control, quality assurance and reliability in the manufacture of microelectronic devices. For engineers, foremen and skilled workers involved in the production of MEU.
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