The results of research and development in the field of creation and functioning of modern technological complexes of integrated processes for the production of electronics products, starting from cleaning the surface of substrates with ultrasound, microwave plasma-chemical processing, magnetron electron-beam and pulsed laser formation of structures and layer composition, high-frequency local heating, diffusion welding, as well as integrated control of micro- and nanostructures. Designed for engineering and technical workers of enterprises of electronic and other industries, specialists of research institutes, graduate students, undergraduates and senior students of technical universities.