BOOKS - TECHNICAL SCIENCES - Plasma Electronics Applications in Microelectronic Devic...
Plasma Electronics Applications in Microelectronic Device Fabrication - Toshiaki Makabe, Zoran Lj. Petrovic 2006 PDF CRC Press BOOKS TECHNICAL SCIENCES
US $6.80

Views
129014
Plasma Electronics Applications in Microelectronic Device Fabrication
Author: Toshiaki Makabe, Zoran Lj. Petrovic
Year: 2006
Number of pages: 336
Format: PDF
File size: 10,22 MB
Language: ENG

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis.

You may also be interested in: