Examples of use in radio devices of microelectromechanical systems (MEMS) of various types are given: switches, actuators, sensors of physical quantities, gyroscopes, accelerometers and others. Classification of inertia sensors: accelerometers, gyroscopes is presented. The principles of operation and characteristics of various types of microactuators and pressure sensors, as well as technical characteristics of MEMS generators of SiTime, Vectron Interna-tional, Discera are given.