The textbook discusses general and special issues of designing elements and devices of technological systems of electronic engineering of vacuum systems of equipment of thin-film technology, vacuum devices with non-contact magnetic interaction, magnetic and electromagnetic systems of vacuum process equipment, l-coordinate actuating devices, devices based on wave motion and motion inputs to vacuum, support units, various transmission mechanisms, tribocouples with modifying polymer coatings, electrostatic fasteners, as well as issues of calculating the functional systems of vacuum equipment for the introduced level of contamination, gas emission, etc. The educational material corresponds to the course "Theory of Mechanisms and Machines," it is clearly systematized, given in an understandable form. The text contains drawings, informative diagrams, tables and graphs. The main advantage of the textbook is the presence of a large number of methodologically effective practical examples with an analysis of solutions.