BOOKS - EQUIPMENT - An Ultra-thin CMOS Sensor for In-plane Stress Sensing
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147755
147755
An Ultra-thin CMOS Sensor for In-plane Stress Sensing
Author: Yigit Uygar Mahsereci
Year: 2019
Number of pages: 164
Format: PDF
File size: 18.6 MB
Language: ENG
Year: 2019
Number of pages: 164
Format: PDF
File size: 18.6 MB
Language: ENG
Ultra-thin chips combine flexibility and mechanical stability of silicon (20 ?m thick) and maturity of CMOS technology. However, circuit design on bendable dies brings up new challenges that are not typically present in rigid electronics. Due to bending, variable stress emerges in silicon, changing the mobility of carriers, which may lead to inaccuracy or failure of the circuit. In order to obtain a robust, precise system, bending must be considered in the design phase prior to fabrication. This work focuses on development of a precision flexible CMOS in-plane stress sensor to measure the complex stress-displacement relationship of a Fin Ray robotic gripper without introducing nonlinearity. Within this framework, a stress-aware mixed-signal design flow is developed for the first time, demonstrating the feasibility of high performance, complex circuitry on ultra-thin chips, in turn flexible foils.