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Wafer Manufacturing Shaping of Single Crystal Silicon Wafers - Imin Kao, Chunhui Chung 2021 PDF John Wiley & Sons BOOKS TECHNICAL SCIENCES
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Wafer Manufacturing Shaping of Single Crystal Silicon Wafers
Author: Imin Kao, Chunhui Chung
Year: 2021
Format: PDF
File size: 12.09 MB
Language: ENG

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

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